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51	JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9 Add to Reading List Source URL: www.soitec.com Language: English - Date: 2010-12-09 11:08:13 Technology Silicon on insulator Thermal oxidation Ion implantation Wafer Microelectromechanical systems Silicon on sapphire Smart Cut Epitaxy Semiconductor device fabrication Materials science Microtechnology